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Online Mass spectrometer Gas Analyzer

Online Mass spectrometer Gas Analyzer

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Main Parameters:

◆ Quadrupole Mass Spectrometer: INFICON (Germany) online mass spectrometer (Made in USA, provided with Certificate of Origin and Original Factory Calibration Test Certificate);

◆ Mass Range: Default 1-100 amu; Optional 1-200 amu or 1-300 amu;

◆ Filament: Iridium-coated filament, 2 sets (1 active + 1 backup, software-switchable);

◆ Detection Limit: <90 ppb;

◆ Scanning Speed: Up to 1.8 ms/amu, step size 0.1 amu;

◆ Gas Sampling Flow Rate: Default ultra-low flow sampling at 2 SCCM, minimum down to 0.2 SCCM (eliminates air intake issues associated with high-flow sampling systems);

◆ Response Time: Maintains ultra-fast response (<1 second) even at low flow rates (<2 SCCM);

◆ Split System: Equipped with high-precision split system ensuring rapid and sensitive response;

◆ Soft Ionization: Adjustable ion source electron energy via software for enhanced resolution;

◆ Turbo Molecular Pump: Pumping speed ≥90 L/s (N₂), rotation speed ≥99.000 rpm, ultimate pressure ≤5×10⁻¹⁰ mbar;

◆ Resolution: ≤1 ppm, signal-to-noise ratio >1 for atmospheric krypton;

◆ Dry Pump: Imported dry pump, pumping speed 0.8 m³/h, ultimate vacuum ≤0.5×10⁻¹ hPa;

◆ Mass Spectrometer Chamber: Monolithic (non-welded) chamber with heated baking function (≥110℃);

◆ Inlet System: 1.2m passivated stainless steel capillary inlet with anti-condensation/clogging protection; default sampling pressure 100±10 kPa (customizable for negative/high pressure sampling);

◆ Software Analysis System: INFICON (Germany), English interface; TCP/IP communication protocol.

◆ Dimensions: H510mm × L520mm × W225mm, Weight 30kg, highly integrated design.

Test report

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Other functions

◆ Weld-free ultra-high vacuum chamber technology (reducing conventional 4 welds to 0 welds);

◆ Turbo pump high-vacuum MAX conductance interface technology (increasing conductance area by 3x, shortening conductance path by 5x) for ultimate sensitivity;

◆ Real-time monitoring of turbo pump current/voltage and chamber temperature;

◆ Anti-vapor condensation sampling line design; Clog-resistant sampling port protection.

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